New Method for Reduction of the Capacitor Leakage Failure Rate Without ...
Abstract: In the development of dynamic random access memory (DRAM) with a device size of 20 nm or less, the leakage current of a capacitor with high-k dielectrics is one of the main factors causing the failure of a device. To reduce the failure rate of the device, we conducted experiments to reduce the boron impurities, which form defect sites in the dielectrics of …